- Aselta Inscale software is a comprehensive platform defined as a toolbox : it is very easy to optimize specific use cases, such as hotspot removal, software process matching, write time reduction…
- The tool is based on powerful accurate empirical models, taking into account both exposure and process effects, including etching, loading, etc.
- It can concurrently optimize fracturing, dose modulation and geometry optimization.
- And it comes with the mandatory verification tools such as process simulators, geometry checkers, mask shot checkers
- Aselta modeling has proven capabilities in industrial applications of EUV mask writing
- Inscale proposes a full set of tools for mask data preparation :
- Model-based MPC
- Rule-based MPC
- Advanced fracturing
- Shot rule check
- Model-based check
- Inscale has an unique curvilinear MPC functionality, ready for the next generation of ILT masks from multi-beam mask writers
- Inscale supports all the major formats of the industry.
Would you like to know more about Inscale and Aselta MDP solutions ?