Publications

2021

2020

Bertrand Le-Gratiet, Régis Bouyssou, Julien Ducoté, Alain Ostrovsky, Charlotte Beylier, Christian Gardin, Nivea Schuch, Vincent Annezo, Loïc Schneider, Matthieu Millequant, Paolo Petroni, Thiago Figueiro, and Patrick Schiavone "Contour based metrology : “make measurable what is not so"", Proc. SPIE 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV, 1132505 (27 March 2020) ; https://doi.org/10.1117/12.2551907

2019

Bertrand Le Gratiet, Régis Bouyssou, Julien Ducoté, Christophe Dezauzier, Alain Ostrovsky, Charlotte Beylier, Christian Gardin, Paolo Petroni, Matthieu Milléquant, Alexandre Chagoya-Garzon, and Patrick Schiavone "Contour based metrology : getting more from a SEM image", Proc. SPIE 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII, 109591M (26 March 2019) ; https://doi.org/10.1117/12.2511626