SEM Image based process control

SEM Image based process control

A software tool able to perform process control applications based on monitoring different measurements accross sites and wafers.

Image Quality Module

Capacity to evaluate the level of sharpness of a SEM image and identify if the SEM tool is drifting.
Moreover, this tool is capable of warn the user to disregard measurement results coming from low quality images and, after calibration, to compensate for small blur effects on the final measurement.

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