SEM Image Metrology PLatform - SIMPL
Aselta extended the use of its e-beam modeling expertise to electron imaging applications (CD-SEM, electron inspection, TEM)
Technology
- Model-based approach for e-beam imaging and contour extraction
- Compact models for inspection and CD-SEM
- Can be assisted by the CAD layout
- Model accuracy and Contour Extraction outstanding robustness and accuracy validated on many metro/inspection equipment
- Robustness to noise and charging
- Better accuracy
Contact Us
Would you like to know more about SIMPL ?
Contact thiago.figueiro@aselta.com
