SEM Image Metrology PLatform - SIMPL

Aselta extended the use of its e-beam modeling expertise to electron imaging applications (CD-SEM, electron inspection, TEM)


  • Model-based approach for e-beam imaging and contour extraction
  • Compact models for inspection and CD-SEM
  • Can be assisted by the CAD layout
  • Model accuracy and Contour Extraction outstanding robustness and accuracy validated on many metro/inspection equipment
  • Robustness to noise and charging
  • Better accuracy

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